Thin Film Studies by Energy Dispersive X-Ray Analysis Technique: Review

Metal chalcogenide thin films have attracted the attention of many scientists because of unique optical, physical and electric properties. Characterization of the prepared films has been carried out by using different tools. In this work, energy dispersive X-ray analysis (EDX) was used to investigate the compositional of samples. The EDX analyzer was equipped with the scanning electron microscopy for rapid identification of source. Experimental results showed that the presence of different elements in particular sample was depending on the experimental conditions. Research findings also highlighted different stoichiometric properties could be observed in the as-deposited film and annealed samples. The samples prepared under optimal compositional ratios showed better morphological and structural behaviors.